Resonance Frequency of Carriages for Linear Roller Guides

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Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE)

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ژورنال

عنوان ژورنال: Journal of the Japan Society for Precision Engineering

سال: 2012

ISSN: 0912-0289,1882-675X

DOI: 10.2493/jjspe.78.599